Self-Package Type Infrared Radiation Microsensor
نویسندگان
چکیده
منابع مشابه
A Resonant Pressure Microsensor Capable of Self-Temperature Compensation
Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the ...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1998
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.118.393